| 规格（mm） | 测量面对基面垂直度 | 测量面平面度或直线度 | 基准面平面度或直线度 | ||||||
| 精度等级 μm | |||||||||
| 1 | 2 | 3 | 1 | 2 | 3 | 1 | 2 | 3 | |
| 200 × 200 | 8 | 16 | 30 | 4 | 8 | 16 | 6 | 12 | 24 |
| 300 × 200 | 10 | 20 | 40 | 5 | 10 | 20 | 8 | 16 | 30 |
| 300 × 300 | 10 | 20 | 40 | 5 | 10 | 20 | 8 | 16 | 30 |
| 400 × 300 | 12 | 24 | 45 | 6 | 12 | 24 | 10 | 20 | 40 |
| 400 × 400 | 12 | 24 | 45 | 6 | 12 | 24 | 10 | 20 | 40 |
| 500 × 400 | 28 | 50 | 14 | 28 | 24 | 48 | |||
| 500 × 500 | 28 | 50 | 14 | 28 | 24 | 48 | |||
| 800 × 600 | 35 | 60 | 18 | 35 | 28 | 55 | |||